Simulation Optimization for the Management of Time Constraint Tunnels in Semiconductor Manufacturing
1 : STMicroelectronics [Crolles]
STMicroelectronics (FRANCE)
2 : Département Sciences de la Fabrication et Logistique
CMP-GC, Mines Saint-Etienne, Univ Clermont Auvergne, CNRS, UMR 6158 LIMOS, Institut Henri Fayol, F - 42023 Saint-Etienne, France